5/13/2010	9:44:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	9:44:58 AM	Recipe started at 9:44 AM
5/13/2010	9:44:58 AM	H2 valve closed
5/13/2010	9:44:58 AM	BCl3 valve closed
5/13/2010	9:44:58 AM	PH3 valve closed
5/13/2010	9:44:58 AM	SiCl4 pre valve closed
5/13/2010	9:44:58 AM	SiCl4 post valve closed
5/13/2010	9:44:58 AM	Main Vac valve closed
5/13/2010	9:44:58 AM	Bypass valve closed
5/13/2010	9:44:58 AM	Bubbler valve closed
5/13/2010	9:44:58 AM	Helium valve opened
5/13/2010	9:44:58 AM	Helium MFC set to  500.000000
5/13/2010	9:44:58 AM	H2 MFC set to  0.000000
5/13/2010	9:44:58 AM	BCl3 MFC set to  0.000000
5/13/2010	9:44:58 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:44:58 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:44:58 AM	Tube furnace set to 0
5/13/2010	9:46:19 AM	Helium valve closed
5/13/2010	9:46:19 AM	H2 valve closed
5/13/2010	9:46:19 AM	BCl3 valve closed
5/13/2010	9:46:19 AM	PH3 valve closed
5/13/2010	9:46:19 AM	SiCl4 pre valve closed
5/13/2010	9:46:19 AM	SiCl4 post valve closed
5/13/2010	9:46:19 AM	Main Vac valve closed
5/13/2010	9:46:19 AM	Bypass valve closed
5/13/2010	9:46:19 AM	Bubbler valve closed
5/13/2010	9:46:19 AM	Helium MFC set to  0.000000
5/13/2010	9:46:19 AM	H2 MFC set to  0.000000
5/13/2010	9:46:19 AM	BCl3 MFC set to  0.000000
5/13/2010	9:46:19 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:46:19 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:46:19 AM	Tube furnace set to 0
5/13/2010	9:46:19 AM	Run finished at 9:46 AM
5/13/2010	9:46:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	9:54:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	9:54:25 AM	Recipe started at 9:54 AM
5/13/2010	9:54:25 AM	Helium valve closed
5/13/2010	9:54:25 AM	H2 valve closed
5/13/2010	9:54:25 AM	BCl3 valve closed
5/13/2010	9:54:25 AM	PH3 valve closed
5/13/2010	9:54:25 AM	SiCl4 pre valve closed
5/13/2010	9:54:25 AM	SiCl4 post valve closed
5/13/2010	9:54:25 AM	Main Vac valve closed
5/13/2010	9:54:25 AM	Bubbler valve closed
5/13/2010	9:54:25 AM	Bypass valve opened
5/13/2010	9:54:25 AM	Helium MFC set to  0.000000
5/13/2010	9:54:25 AM	H2 MFC set to  0.000000
5/13/2010	9:54:25 AM	BCl3 MFC set to  0.000000
5/13/2010	9:54:25 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:54:25 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:54:25 AM	Tube furnace set to 0
5/13/2010	9:55:11 AM	Helium valve closed
5/13/2010	9:55:11 AM	H2 valve closed
5/13/2010	9:55:11 AM	BCl3 valve closed
5/13/2010	9:55:11 AM	PH3 valve closed
5/13/2010	9:55:11 AM	SiCl4 pre valve closed
5/13/2010	9:55:11 AM	SiCl4 post valve closed
5/13/2010	9:55:11 AM	Bubbler valve closed
5/13/2010	9:55:11 AM	Main Vac valve opened
5/13/2010	9:55:11 AM	Bypass valve opened
5/13/2010	9:55:11 AM	Helium MFC set to  0.000000
5/13/2010	9:55:11 AM	H2 MFC set to  0.000000
5/13/2010	9:55:11 AM	BCl3 MFC set to  0.000000
5/13/2010	9:55:11 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:55:11 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:55:11 AM	Tube furnace set to 0
5/13/2010	9:55:11 AM	Run finished at 9:55 AM
5/13/2010	9:55:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	9:57:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	9:57:07 AM	Recipe started at 9:57 AM
5/13/2010	9:57:07 AM	H2 valve closed
5/13/2010	9:57:07 AM	BCl3 valve closed
5/13/2010	9:57:07 AM	PH3 valve closed
5/13/2010	9:57:07 AM	SiCl4 pre valve closed
5/13/2010	9:57:07 AM	SiCl4 post valve closed
5/13/2010	9:57:07 AM	Main Vac valve closed
5/13/2010	9:57:07 AM	Bypass valve closed
5/13/2010	9:57:07 AM	Bubbler valve closed
5/13/2010	9:57:07 AM	Helium valve opened
5/13/2010	9:57:07 AM	Helium MFC set to  500.000000
5/13/2010	9:57:07 AM	H2 MFC set to  0.000000
5/13/2010	9:57:07 AM	BCl3 MFC set to  0.000000
5/13/2010	9:57:07 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:57:07 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:57:07 AM	Tube furnace set to 0
5/13/2010	9:58:27 AM	Helium valve closed
5/13/2010	9:58:27 AM	H2 valve closed
5/13/2010	9:58:27 AM	BCl3 valve closed
5/13/2010	9:58:27 AM	PH3 valve closed
5/13/2010	9:58:27 AM	SiCl4 pre valve closed
5/13/2010	9:58:27 AM	SiCl4 post valve closed
5/13/2010	9:58:27 AM	Main Vac valve closed
5/13/2010	9:58:27 AM	Bypass valve closed
5/13/2010	9:58:27 AM	Bubbler valve closed
5/13/2010	9:58:27 AM	Helium MFC set to  0.000000
5/13/2010	9:58:28 AM	H2 MFC set to  0.000000
5/13/2010	9:58:28 AM	BCl3 MFC set to  0.000000
5/13/2010	9:58:28 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:58:28 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:58:28 AM	Tube furnace set to 0
5/13/2010	9:58:28 AM	Run finished at 9:58 AM
5/13/2010	9:58:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	9:58:31 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	9:58:32 AM	Recipe started at 9:58 AM
5/13/2010	9:58:32 AM	Helium valve closed
5/13/2010	9:58:32 AM	H2 valve closed
5/13/2010	9:58:32 AM	BCl3 valve closed
5/13/2010	9:58:32 AM	PH3 valve closed
5/13/2010	9:58:32 AM	SiCl4 pre valve closed
5/13/2010	9:58:32 AM	SiCl4 post valve closed
5/13/2010	9:58:32 AM	Main Vac valve closed
5/13/2010	9:58:32 AM	Bubbler valve closed
5/13/2010	9:58:32 AM	Bypass valve opened
5/13/2010	9:58:32 AM	Helium MFC set to  0.000000
5/13/2010	9:58:32 AM	H2 MFC set to  0.000000
5/13/2010	9:58:32 AM	BCl3 MFC set to  0.000000
5/13/2010	9:58:32 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:58:32 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:58:32 AM	Tube furnace set to 0
5/13/2010	9:59:04 AM	Helium valve closed
5/13/2010	9:59:04 AM	H2 valve closed
5/13/2010	9:59:04 AM	BCl3 valve closed
5/13/2010	9:59:04 AM	PH3 valve closed
5/13/2010	9:59:04 AM	SiCl4 pre valve closed
5/13/2010	9:59:04 AM	SiCl4 post valve closed
5/13/2010	9:59:04 AM	Bubbler valve closed
5/13/2010	9:59:04 AM	Main Vac valve opened
5/13/2010	9:59:04 AM	Bypass valve opened
5/13/2010	9:59:04 AM	Helium MFC set to  0.000000
5/13/2010	9:59:04 AM	H2 MFC set to  0.000000
5/13/2010	9:59:04 AM	BCl3 MFC set to  0.000000
5/13/2010	9:59:04 AM	SiCl4 MFC set to  0.000000
5/13/2010	9:59:04 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	9:59:04 AM	Tube furnace set to 0
5/13/2010	9:59:05 AM	Run finished at 9:59 AM
5/13/2010	9:59:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	10:01:19 AM	Main Vac valve closed
5/13/2010	10:01:19 AM	Bypass valve closed
5/13/2010	10:01:28 AM	Main Vac valve opened
5/13/2010	10:01:28 AM	Bypass valve opened
5/13/2010	10:01:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	10:01:53 AM	Recipe started at 10:01 AM
5/13/2010	10:01:53 AM	H2 valve closed
5/13/2010	10:01:53 AM	BCl3 valve closed
5/13/2010	10:01:53 AM	PH3 valve closed
5/13/2010	10:01:53 AM	SiCl4 pre valve closed
5/13/2010	10:01:53 AM	SiCl4 post valve closed
5/13/2010	10:01:53 AM	Main Vac valve closed
5/13/2010	10:01:53 AM	Bypass valve closed
5/13/2010	10:01:53 AM	Bubbler valve closed
5/13/2010	10:01:53 AM	Helium valve opened
5/13/2010	10:01:53 AM	Helium MFC set to  500.000000
5/13/2010	10:01:53 AM	H2 MFC set to  0.000000
5/13/2010	10:01:53 AM	BCl3 MFC set to  0.000000
5/13/2010	10:01:53 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:01:53 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:01:53 AM	Tube furnace set to 0
5/13/2010	10:03:13 AM	Helium valve closed
5/13/2010	10:03:13 AM	H2 valve closed
5/13/2010	10:03:13 AM	BCl3 valve closed
5/13/2010	10:03:13 AM	PH3 valve closed
5/13/2010	10:03:13 AM	SiCl4 pre valve closed
5/13/2010	10:03:13 AM	SiCl4 post valve closed
5/13/2010	10:03:13 AM	Main Vac valve closed
5/13/2010	10:03:13 AM	Bypass valve closed
5/13/2010	10:03:13 AM	Bubbler valve closed
5/13/2010	10:03:13 AM	Helium MFC set to  0.000000
5/13/2010	10:03:13 AM	H2 MFC set to  0.000000
5/13/2010	10:03:13 AM	BCl3 MFC set to  0.000000
5/13/2010	10:03:13 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:03:13 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:03:14 AM	Tube furnace set to 0
5/13/2010	10:03:14 AM	Run finished at 10:03 AM
5/13/2010	10:03:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	10:08:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	10:08:54 AM	Recipe started at 10:08 AM
5/13/2010	10:08:54 AM	Helium valve closed
5/13/2010	10:08:54 AM	H2 valve closed
5/13/2010	10:08:54 AM	BCl3 valve closed
5/13/2010	10:08:54 AM	PH3 valve closed
5/13/2010	10:08:54 AM	SiCl4 pre valve closed
5/13/2010	10:08:54 AM	SiCl4 post valve closed
5/13/2010	10:08:54 AM	Main Vac valve closed
5/13/2010	10:08:54 AM	Bubbler valve closed
5/13/2010	10:08:54 AM	Bypass valve opened
5/13/2010	10:08:54 AM	Helium MFC set to  0.000000
5/13/2010	10:08:54 AM	H2 MFC set to  0.000000
5/13/2010	10:08:54 AM	BCl3 MFC set to  0.000000
5/13/2010	10:08:54 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:08:54 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:08:54 AM	Tube furnace set to 0
5/13/2010	10:09:40 AM	Helium valve closed
5/13/2010	10:09:40 AM	H2 valve closed
5/13/2010	10:09:40 AM	BCl3 valve closed
5/13/2010	10:09:40 AM	PH3 valve closed
5/13/2010	10:09:40 AM	SiCl4 pre valve closed
5/13/2010	10:09:40 AM	SiCl4 post valve closed
5/13/2010	10:09:40 AM	Bubbler valve closed
5/13/2010	10:09:40 AM	Main Vac valve opened
5/13/2010	10:09:40 AM	Bypass valve opened
5/13/2010	10:09:40 AM	Helium MFC set to  0.000000
5/13/2010	10:09:40 AM	H2 MFC set to  0.000000
5/13/2010	10:09:40 AM	BCl3 MFC set to  0.000000
5/13/2010	10:09:40 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:09:40 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:09:40 AM	Tube furnace set to 0
5/13/2010	10:09:40 AM	Run finished at 10:09 AM
5/13/2010	10:09:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	10:12:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	10:12:33 AM	Recipe started at 10:12 AM
5/13/2010	10:12:33 AM	H2 valve closed
5/13/2010	10:12:33 AM	BCl3 valve closed
5/13/2010	10:12:33 AM	PH3 valve closed
5/13/2010	10:12:33 AM	SiCl4 pre valve closed
5/13/2010	10:12:33 AM	SiCl4 post valve closed
5/13/2010	10:12:33 AM	Main Vac valve closed
5/13/2010	10:12:33 AM	Bypass valve closed
5/13/2010	10:12:33 AM	Bubbler valve closed
5/13/2010	10:12:33 AM	Helium valve opened
5/13/2010	10:12:33 AM	Helium MFC set to  500.000000
5/13/2010	10:12:33 AM	H2 MFC set to  0.000000
5/13/2010	10:12:33 AM	BCl3 MFC set to  0.000000
5/13/2010	10:12:33 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:12:33 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:12:33 AM	Tube furnace set to 0
5/13/2010	10:13:54 AM	Helium valve closed
5/13/2010	10:13:54 AM	H2 valve closed
5/13/2010	10:13:54 AM	BCl3 valve closed
5/13/2010	10:13:54 AM	PH3 valve closed
5/13/2010	10:13:54 AM	SiCl4 pre valve closed
5/13/2010	10:13:54 AM	SiCl4 post valve closed
5/13/2010	10:13:54 AM	Main Vac valve closed
5/13/2010	10:13:54 AM	Bypass valve closed
5/13/2010	10:13:54 AM	Bubbler valve closed
5/13/2010	10:13:54 AM	Helium MFC set to  0.000000
5/13/2010	10:13:54 AM	H2 MFC set to  0.000000
5/13/2010	10:13:54 AM	BCl3 MFC set to  0.000000
5/13/2010	10:13:54 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:13:54 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:13:54 AM	Tube furnace set to 0
5/13/2010	10:13:54 AM	Run finished at 10:13 AM
5/13/2010	10:13:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	10:14:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	10:14:02 AM	Recipe started at 10:14 AM
5/13/2010	10:14:02 AM	Helium valve closed
5/13/2010	10:14:02 AM	H2 valve closed
5/13/2010	10:14:02 AM	BCl3 valve closed
5/13/2010	10:14:03 AM	PH3 valve closed
5/13/2010	10:14:03 AM	SiCl4 pre valve closed
5/13/2010	10:14:03 AM	SiCl4 post valve closed
5/13/2010	10:14:03 AM	Main Vac valve closed
5/13/2010	10:14:03 AM	Bubbler valve closed
5/13/2010	10:14:03 AM	Bypass valve opened
5/13/2010	10:14:03 AM	Helium MFC set to  0.000000
5/13/2010	10:14:03 AM	H2 MFC set to  0.000000
5/13/2010	10:14:03 AM	BCl3 MFC set to  0.000000
5/13/2010	10:14:03 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:14:03 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:14:03 AM	Tube furnace set to 0
5/13/2010	10:14:35 AM	Helium valve closed
5/13/2010	10:14:35 AM	H2 valve closed
5/13/2010	10:14:35 AM	BCl3 valve closed
5/13/2010	10:14:35 AM	PH3 valve closed
5/13/2010	10:14:35 AM	SiCl4 pre valve closed
5/13/2010	10:14:35 AM	SiCl4 post valve closed
5/13/2010	10:14:35 AM	Bubbler valve closed
5/13/2010	10:14:35 AM	Main Vac valve opened
5/13/2010	10:14:35 AM	Bypass valve opened
5/13/2010	10:14:35 AM	Helium MFC set to  0.000000
5/13/2010	10:14:35 AM	H2 MFC set to  0.000000
5/13/2010	10:14:35 AM	BCl3 MFC set to  0.000000
5/13/2010	10:14:35 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:14:35 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:14:35 AM	Tube furnace set to 0
5/13/2010	10:14:35 AM	Run finished at 10:14 AM
5/13/2010	10:14:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	10:27:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	10:27:50 AM	Recipe started at 10:27 AM
5/13/2010	10:27:50 AM	H2 valve closed
5/13/2010	10:27:50 AM	BCl3 valve closed
5/13/2010	10:27:50 AM	PH3 valve closed
5/13/2010	10:27:50 AM	SiCl4 pre valve closed
5/13/2010	10:27:50 AM	SiCl4 post valve closed
5/13/2010	10:27:50 AM	Main Vac valve closed
5/13/2010	10:27:50 AM	Bypass valve closed
5/13/2010	10:27:50 AM	Bubbler valve closed
5/13/2010	10:27:50 AM	Helium valve opened
5/13/2010	10:27:50 AM	Helium MFC set to  500.000000
5/13/2010	10:27:50 AM	H2 MFC set to  0.000000
5/13/2010	10:27:50 AM	BCl3 MFC set to  0.000000
5/13/2010	10:27:50 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:27:50 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:27:51 AM	Tube furnace set to 0
5/13/2010	10:28:18 AM	Helium valve closed
5/13/2010	10:28:18 AM	H2 valve closed
5/13/2010	10:28:18 AM	BCl3 valve closed
5/13/2010	10:28:18 AM	PH3 valve closed
5/13/2010	10:28:18 AM	SiCl4 pre valve closed
5/13/2010	10:28:18 AM	SiCl4 post valve closed
5/13/2010	10:28:18 AM	Main Vac valve closed
5/13/2010	10:28:18 AM	Bypass valve closed
5/13/2010	10:28:18 AM	Bubbler valve closed
5/13/2010	10:28:18 AM	Helium MFC set to  0.000000
5/13/2010	10:28:18 AM	H2 MFC set to  0.000000
5/13/2010	10:28:18 AM	BCl3 MFC set to  0.000000
5/13/2010	10:28:18 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:28:18 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:28:18 AM	Tube furnace set to 0
5/13/2010	10:28:33 AM	Helium valve closed
5/13/2010	10:28:33 AM	H2 valve closed
5/13/2010	10:28:33 AM	BCl3 valve closed
5/13/2010	10:28:33 AM	PH3 valve closed
5/13/2010	10:28:33 AM	SiCl4 pre valve closed
5/13/2010	10:28:33 AM	SiCl4 post valve closed
5/13/2010	10:28:33 AM	Main Vac valve closed
5/13/2010	10:28:33 AM	Bubbler valve closed
5/13/2010	10:28:33 AM	Bypass valve opened
5/13/2010	10:28:33 AM	Helium MFC set to  0.000000
5/13/2010	10:28:33 AM	H2 MFC set to  0.000000
5/13/2010	10:28:33 AM	BCl3 MFC set to  0.000000
5/13/2010	10:28:33 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:28:33 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:28:33 AM	Tube furnace set to 0
5/13/2010	10:28:56 AM	Helium valve closed
5/13/2010	10:28:56 AM	H2 valve closed
5/13/2010	10:28:56 AM	BCl3 valve closed
5/13/2010	10:28:56 AM	PH3 valve closed
5/13/2010	10:28:56 AM	SiCl4 pre valve closed
5/13/2010	10:28:56 AM	SiCl4 post valve closed
5/13/2010	10:28:56 AM	Bubbler valve closed
5/13/2010	10:28:56 AM	Main Vac valve opened
5/13/2010	10:28:56 AM	Bypass valve opened
5/13/2010	10:28:56 AM	Helium MFC set to  0.000000
5/13/2010	10:28:56 AM	H2 MFC set to  0.000000
5/13/2010	10:28:56 AM	BCl3 MFC set to  0.000000
5/13/2010	10:28:56 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:28:56 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:28:56 AM	Tube furnace set to 0
5/13/2010	10:30:10 AM	H2 valve closed
5/13/2010	10:30:10 AM	BCl3 valve closed
5/13/2010	10:30:10 AM	PH3 valve closed
5/13/2010	10:30:10 AM	SiCl4 pre valve closed
5/13/2010	10:30:10 AM	SiCl4 post valve closed
5/13/2010	10:30:10 AM	Main Vac valve closed
5/13/2010	10:30:10 AM	Bypass valve closed
5/13/2010	10:30:10 AM	Bubbler valve closed
5/13/2010	10:30:10 AM	Helium valve opened
5/13/2010	10:30:10 AM	Helium MFC set to  500.000000
5/13/2010	10:30:10 AM	H2 MFC set to  0.000000
5/13/2010	10:30:10 AM	BCl3 MFC set to  0.000000
5/13/2010	10:30:10 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:30:10 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:30:10 AM	Tube furnace set to 0
5/13/2010	10:30:50 AM	Helium valve closed
5/13/2010	10:30:50 AM	H2 valve closed
5/13/2010	10:30:50 AM	BCl3 valve closed
5/13/2010	10:30:50 AM	PH3 valve closed
5/13/2010	10:30:50 AM	SiCl4 pre valve closed
5/13/2010	10:30:50 AM	SiCl4 post valve closed
5/13/2010	10:30:50 AM	Main Vac valve closed
5/13/2010	10:30:50 AM	Bypass valve closed
5/13/2010	10:30:50 AM	Bubbler valve closed
5/13/2010	10:30:50 AM	Helium MFC set to  0.000000
5/13/2010	10:30:50 AM	H2 MFC set to  0.000000
5/13/2010	10:30:50 AM	BCl3 MFC set to  0.000000
5/13/2010	10:30:50 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:30:50 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:30:50 AM	Tube furnace set to 0
5/13/2010	10:30:55 AM	Helium valve closed
5/13/2010	10:30:55 AM	H2 valve closed
5/13/2010	10:30:55 AM	BCl3 valve closed
5/13/2010	10:30:55 AM	PH3 valve closed
5/13/2010	10:30:55 AM	SiCl4 pre valve closed
5/13/2010	10:30:55 AM	SiCl4 post valve closed
5/13/2010	10:30:55 AM	Main Vac valve closed
5/13/2010	10:30:55 AM	Bubbler valve closed
5/13/2010	10:30:55 AM	Bypass valve opened
5/13/2010	10:30:55 AM	Helium MFC set to  0.000000
5/13/2010	10:30:55 AM	H2 MFC set to  0.000000
5/13/2010	10:30:55 AM	BCl3 MFC set to  0.000000
5/13/2010	10:30:55 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:30:55 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:30:55 AM	Tube furnace set to 0
5/13/2010	10:31:21 AM	Helium valve closed
5/13/2010	10:31:21 AM	H2 valve closed
5/13/2010	10:31:21 AM	BCl3 valve closed
5/13/2010	10:31:21 AM	PH3 valve closed
5/13/2010	10:31:21 AM	SiCl4 pre valve closed
5/13/2010	10:31:21 AM	SiCl4 post valve closed
5/13/2010	10:31:21 AM	Bubbler valve closed
5/13/2010	10:31:21 AM	Main Vac valve opened
5/13/2010	10:31:21 AM	Bypass valve opened
5/13/2010	10:31:21 AM	Helium MFC set to  0.000000
5/13/2010	10:31:21 AM	H2 MFC set to  0.000000
5/13/2010	10:31:21 AM	BCl3 MFC set to  0.000000
5/13/2010	10:31:21 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:31:21 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:31:22 AM	Tube furnace set to 0
5/13/2010	10:33:52 AM	H2 valve closed
5/13/2010	10:33:52 AM	BCl3 valve closed
5/13/2010	10:33:52 AM	PH3 valve closed
5/13/2010	10:33:52 AM	SiCl4 pre valve closed
5/13/2010	10:33:52 AM	SiCl4 post valve closed
5/13/2010	10:33:52 AM	Main Vac valve closed
5/13/2010	10:33:52 AM	Bypass valve closed
5/13/2010	10:33:52 AM	Bubbler valve closed
5/13/2010	10:33:52 AM	Helium valve opened
5/13/2010	10:33:52 AM	Helium MFC set to  500.000000
5/13/2010	10:33:52 AM	H2 MFC set to  0.000000
5/13/2010	10:33:52 AM	BCl3 MFC set to  0.000000
5/13/2010	10:33:52 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:33:52 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:33:53 AM	Tube furnace set to 0
5/13/2010	10:35:02 AM	Helium valve closed
5/13/2010	10:35:02 AM	H2 valve closed
5/13/2010	10:35:02 AM	BCl3 valve closed
5/13/2010	10:35:02 AM	PH3 valve closed
5/13/2010	10:35:02 AM	SiCl4 pre valve closed
5/13/2010	10:35:02 AM	SiCl4 post valve closed
5/13/2010	10:35:02 AM	Main Vac valve closed
5/13/2010	10:35:02 AM	Bypass valve closed
5/13/2010	10:35:02 AM	Bubbler valve closed
5/13/2010	10:35:02 AM	Helium MFC set to  0.000000
5/13/2010	10:35:02 AM	H2 MFC set to  0.000000
5/13/2010	10:35:02 AM	BCl3 MFC set to  0.000000
5/13/2010	10:35:02 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:35:02 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:35:02 AM	Tube furnace set to 0
5/13/2010	10:35:17 AM	Helium valve closed
5/13/2010	10:35:17 AM	H2 valve closed
5/13/2010	10:35:17 AM	BCl3 valve closed
5/13/2010	10:35:17 AM	PH3 valve closed
5/13/2010	10:35:17 AM	SiCl4 pre valve closed
5/13/2010	10:35:17 AM	SiCl4 post valve closed
5/13/2010	10:35:17 AM	Main Vac valve closed
5/13/2010	10:35:17 AM	Bubbler valve closed
5/13/2010	10:35:17 AM	Bypass valve opened
5/13/2010	10:35:17 AM	Helium MFC set to  0.000000
5/13/2010	10:35:17 AM	H2 MFC set to  0.000000
5/13/2010	10:35:17 AM	BCl3 MFC set to  0.000000
5/13/2010	10:35:17 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:35:17 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:35:17 AM	Tube furnace set to 0
5/13/2010	10:35:48 AM	Helium valve closed
5/13/2010	10:35:48 AM	H2 valve closed
5/13/2010	10:35:48 AM	BCl3 valve closed
5/13/2010	10:35:48 AM	PH3 valve closed
5/13/2010	10:35:48 AM	SiCl4 pre valve closed
5/13/2010	10:35:48 AM	SiCl4 post valve closed
5/13/2010	10:35:48 AM	Bubbler valve closed
5/13/2010	10:35:48 AM	Main Vac valve opened
5/13/2010	10:35:48 AM	Bypass valve opened
5/13/2010	10:35:48 AM	Helium MFC set to  0.000000
5/13/2010	10:35:48 AM	H2 MFC set to  0.000000
5/13/2010	10:35:48 AM	BCl3 MFC set to  0.000000
5/13/2010	10:35:48 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:35:48 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:35:48 AM	Tube furnace set to 0
5/13/2010	10:37:20 AM	Helium valve closed
5/13/2010	10:37:20 AM	H2 valve closed
5/13/2010	10:37:20 AM	BCl3 valve closed
5/13/2010	10:37:20 AM	PH3 valve closed
5/13/2010	10:37:20 AM	SiCl4 pre valve closed
5/13/2010	10:37:20 AM	SiCl4 post valve closed
5/13/2010	10:37:20 AM	Bubbler valve closed
5/13/2010	10:37:20 AM	Main Vac valve opened
5/13/2010	10:37:20 AM	Bypass valve opened
5/13/2010	10:37:20 AM	Helium MFC set to  0.000000
5/13/2010	10:37:20 AM	H2 MFC set to  0.000000
5/13/2010	10:37:20 AM	BCl3 MFC set to  0.000000
5/13/2010	10:37:20 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:37:20 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:37:20 AM	Tube furnace set to 0
5/13/2010	10:37:21 AM	Run finished at 10:37 AM
5/13/2010	10:37:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	10:39:55 AM	Recipe started at 10:39 AM
5/13/2010	10:39:55 AM	Helium valve closed
5/13/2010	10:39:55 AM	BCl3 valve closed
5/13/2010	10:39:55 AM	PH3 valve closed
5/13/2010	10:39:55 AM	SiCl4 pre valve closed
5/13/2010	10:39:55 AM	SiCl4 post valve closed
5/13/2010	10:39:55 AM	Main Vac valve closed
5/13/2010	10:39:55 AM	Bypass valve closed
5/13/2010	10:39:55 AM	Bubbler valve closed
5/13/2010	10:39:55 AM	H2 valve opened
5/13/2010	10:39:55 AM	Helium MFC set to  0.000000
5/13/2010	10:39:55 AM	H2 MFC set to  500.000000
5/13/2010	10:39:55 AM	BCl3 MFC set to  0.000000
5/13/2010	10:39:55 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:39:55 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:39:56 AM	Tube furnace set to 0
5/13/2010	10:41:19 AM	Helium valve closed
5/13/2010	10:41:19 AM	BCl3 valve closed
5/13/2010	10:41:19 AM	PH3 valve closed
5/13/2010	10:41:19 AM	SiCl4 pre valve closed
5/13/2010	10:41:19 AM	SiCl4 post valve closed
5/13/2010	10:41:19 AM	Main Vac valve closed
5/13/2010	10:41:19 AM	Bypass valve closed
5/13/2010	10:41:19 AM	H2 valve opened
5/13/2010	10:41:19 AM	Bubbler valve opened
5/13/2010	10:41:19 AM	Helium MFC set to  0.000000
5/13/2010	10:41:19 AM	H2 MFC set to  500.000000
5/13/2010	10:41:19 AM	BCl3 MFC set to  0.000000
5/13/2010	10:41:19 AM	SiCl4 MFC set to  0.000000
5/13/2010	10:41:19 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	10:41:19 AM	Tube furnace set to 1000
5/13/2010	11:01:19 AM	Helium valve closed
5/13/2010	11:01:19 AM	PH3 valve closed
5/13/2010	11:01:19 AM	Main Vac valve closed
5/13/2010	11:01:19 AM	Bypass valve closed
5/13/2010	11:01:19 AM	H2 valve opened
5/13/2010	11:01:19 AM	BCl3 valve opened
5/13/2010	11:01:19 AM	SiCl4 pre valve opened
5/13/2010	11:01:19 AM	SiCl4 post valve opened
5/13/2010	11:01:19 AM	Bubbler valve opened
5/13/2010	11:01:19 AM	Helium MFC set to  0.000000
5/13/2010	11:01:19 AM	H2 MFC set to  500.000000
5/13/2010	11:01:19 AM	BCl3 MFC set to  35.000000
5/13/2010	11:01:19 AM	SiCl4 MFC set to  350.000000
5/13/2010	11:01:19 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	11:01:19 AM	Tube furnace set to 1000
5/13/2010	11:16:19 AM	H2 valve closed
5/13/2010	11:16:19 AM	BCl3 valve closed
5/13/2010	11:16:19 AM	PH3 valve closed
5/13/2010	11:16:19 AM	SiCl4 pre valve closed
5/13/2010	11:16:19 AM	SiCl4 post valve closed
5/13/2010	11:16:19 AM	Main Vac valve closed
5/13/2010	11:16:19 AM	Bypass valve closed
5/13/2010	11:16:19 AM	Helium valve opened
5/13/2010	11:16:19 AM	Bubbler valve opened
5/13/2010	11:16:19 AM	Helium MFC set to  500.000000
5/13/2010	11:16:19 AM	H2 MFC set to  0.000000
5/13/2010	11:16:19 AM	BCl3 MFC set to  0.000000
5/13/2010	11:16:19 AM	SiCl4 MFC set to  0.000000
5/13/2010	11:16:19 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	11:16:19 AM	Tube furnace set to 0
5/13/2010	11:36:19 AM	Helium valve closed
5/13/2010	11:36:19 AM	H2 valve closed
5/13/2010	11:36:19 AM	BCl3 valve closed
5/13/2010	11:36:19 AM	PH3 valve closed
5/13/2010	11:36:19 AM	SiCl4 pre valve closed
5/13/2010	11:36:19 AM	SiCl4 post valve closed
5/13/2010	11:36:19 AM	Main Vac valve closed
5/13/2010	11:36:19 AM	Bypass valve closed
5/13/2010	11:36:19 AM	Bubbler valve closed
5/13/2010	11:36:19 AM	Helium MFC set to  0.000000
5/13/2010	11:36:19 AM	H2 MFC set to  0.000000
5/13/2010	11:36:19 AM	BCl3 MFC set to  0.000000
5/13/2010	11:36:19 AM	SiCl4 MFC set to  0.000000
5/13/2010	11:36:19 AM	Bypass solenoid MFC set to  0.000000
5/13/2010	11:36:19 AM	Tube furnace set to 0
5/13/2010	11:36:20 AM	Run finished at 11:36 AM
5/13/2010	1:08:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	1:08:44 PM	Recipe started at 1:08 PM
5/13/2010	1:08:44 PM	H2 valve closed
5/13/2010	1:08:44 PM	BCl3 valve closed
5/13/2010	1:08:44 PM	PH3 valve closed
5/13/2010	1:08:44 PM	SiCl4 pre valve closed
5/13/2010	1:08:44 PM	SiCl4 post valve closed
5/13/2010	1:08:44 PM	Main Vac valve closed
5/13/2010	1:08:44 PM	Bypass valve closed
5/13/2010	1:08:44 PM	Bubbler valve closed
5/13/2010	1:08:44 PM	Helium valve opened
5/13/2010	1:08:44 PM	Helium MFC set to  500.000000
5/13/2010	1:08:44 PM	H2 MFC set to  0.000000
5/13/2010	1:08:44 PM	BCl3 MFC set to  0.000000
5/13/2010	1:08:44 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:08:44 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:08:45 PM	Tube furnace set to 0
5/13/2010	1:08:47 PM	Helium valve closed
5/13/2010	1:08:47 PM	H2 valve closed
5/13/2010	1:08:47 PM	BCl3 valve closed
5/13/2010	1:08:47 PM	PH3 valve closed
5/13/2010	1:08:47 PM	SiCl4 pre valve closed
5/13/2010	1:08:47 PM	SiCl4 post valve closed
5/13/2010	1:08:47 PM	Main Vac valve closed
5/13/2010	1:08:47 PM	Bypass valve closed
5/13/2010	1:08:47 PM	Bubbler valve closed
5/13/2010	1:08:47 PM	Helium MFC set to  0.000000
5/13/2010	1:08:47 PM	H2 MFC set to  0.000000
5/13/2010	1:08:47 PM	BCl3 MFC set to  0.000000
5/13/2010	1:08:47 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:08:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:08:47 PM	Tube furnace set to 0
5/13/2010	1:09:02 PM	Helium valve closed
5/13/2010	1:09:02 PM	H2 valve closed
5/13/2010	1:09:02 PM	BCl3 valve closed
5/13/2010	1:09:02 PM	PH3 valve closed
5/13/2010	1:09:02 PM	SiCl4 pre valve closed
5/13/2010	1:09:02 PM	SiCl4 post valve closed
5/13/2010	1:09:02 PM	Main Vac valve closed
5/13/2010	1:09:02 PM	Bubbler valve closed
5/13/2010	1:09:02 PM	Bypass valve opened
5/13/2010	1:09:02 PM	Helium MFC set to  0.000000
5/13/2010	1:09:02 PM	H2 MFC set to  0.000000
5/13/2010	1:09:02 PM	BCl3 MFC set to  0.000000
5/13/2010	1:09:02 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:09:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:09:02 PM	Tube furnace set to 0
5/13/2010	1:09:51 PM	Helium valve closed
5/13/2010	1:09:51 PM	H2 valve closed
5/13/2010	1:09:51 PM	BCl3 valve closed
5/13/2010	1:09:51 PM	PH3 valve closed
5/13/2010	1:09:51 PM	SiCl4 pre valve closed
5/13/2010	1:09:51 PM	SiCl4 post valve closed
5/13/2010	1:09:51 PM	Bubbler valve closed
5/13/2010	1:09:51 PM	Main Vac valve opened
5/13/2010	1:09:51 PM	Bypass valve opened
5/13/2010	1:09:51 PM	Helium MFC set to  0.000000
5/13/2010	1:09:51 PM	H2 MFC set to  0.000000
5/13/2010	1:09:51 PM	BCl3 MFC set to  0.000000
5/13/2010	1:09:51 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:09:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:09:51 PM	Tube furnace set to 0
5/13/2010	1:14:51 PM	H2 valve closed
5/13/2010	1:14:51 PM	BCl3 valve closed
5/13/2010	1:14:51 PM	PH3 valve closed
5/13/2010	1:14:51 PM	SiCl4 pre valve closed
5/13/2010	1:14:51 PM	SiCl4 post valve closed
5/13/2010	1:14:51 PM	Main Vac valve closed
5/13/2010	1:14:51 PM	Bypass valve closed
5/13/2010	1:14:51 PM	Bubbler valve closed
5/13/2010	1:14:51 PM	Helium valve opened
5/13/2010	1:14:51 PM	Helium MFC set to  500.000000
5/13/2010	1:14:51 PM	H2 MFC set to  0.000000
5/13/2010	1:14:51 PM	BCl3 MFC set to  0.000000
5/13/2010	1:14:51 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:14:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:14:51 PM	Tube furnace set to 0
5/13/2010	1:16:13 PM	Helium valve closed
5/13/2010	1:16:13 PM	H2 valve closed
5/13/2010	1:16:13 PM	BCl3 valve closed
5/13/2010	1:16:13 PM	PH3 valve closed
5/13/2010	1:16:13 PM	SiCl4 pre valve closed
5/13/2010	1:16:13 PM	SiCl4 post valve closed
5/13/2010	1:16:13 PM	Main Vac valve closed
5/13/2010	1:16:13 PM	Bypass valve closed
5/13/2010	1:16:13 PM	Bubbler valve closed
5/13/2010	1:16:13 PM	Helium MFC set to  0.000000
5/13/2010	1:16:13 PM	H2 MFC set to  0.000000
5/13/2010	1:16:13 PM	BCl3 MFC set to  0.000000
5/13/2010	1:16:13 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:16:13 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:16:13 PM	Tube furnace set to 0
5/13/2010	1:16:28 PM	Helium valve closed
5/13/2010	1:16:28 PM	H2 valve closed
5/13/2010	1:16:28 PM	BCl3 valve closed
5/13/2010	1:16:28 PM	PH3 valve closed
5/13/2010	1:16:28 PM	SiCl4 pre valve closed
5/13/2010	1:16:28 PM	SiCl4 post valve closed
5/13/2010	1:16:28 PM	Main Vac valve closed
5/13/2010	1:16:28 PM	Bubbler valve closed
5/13/2010	1:16:28 PM	Bypass valve opened
5/13/2010	1:16:28 PM	Helium MFC set to  0.000000
5/13/2010	1:16:28 PM	H2 MFC set to  0.000000
5/13/2010	1:16:28 PM	BCl3 MFC set to  0.000000
5/13/2010	1:16:28 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:16:28 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:16:28 PM	Tube furnace set to 0
5/13/2010	1:17:01 PM	Helium valve closed
5/13/2010	1:17:01 PM	H2 valve closed
5/13/2010	1:17:01 PM	BCl3 valve closed
5/13/2010	1:17:01 PM	PH3 valve closed
5/13/2010	1:17:01 PM	SiCl4 pre valve closed
5/13/2010	1:17:01 PM	SiCl4 post valve closed
5/13/2010	1:17:01 PM	Bubbler valve closed
5/13/2010	1:17:01 PM	Main Vac valve opened
5/13/2010	1:17:01 PM	Bypass valve opened
5/13/2010	1:17:01 PM	Helium MFC set to  0.000000
5/13/2010	1:17:01 PM	H2 MFC set to  0.000000
5/13/2010	1:17:01 PM	BCl3 MFC set to  0.000000
5/13/2010	1:17:01 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:17:01 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:17:01 PM	Tube furnace set to 0
5/13/2010	1:22:01 PM	H2 valve closed
5/13/2010	1:22:01 PM	BCl3 valve closed
5/13/2010	1:22:01 PM	PH3 valve closed
5/13/2010	1:22:01 PM	SiCl4 pre valve closed
5/13/2010	1:22:01 PM	SiCl4 post valve closed
5/13/2010	1:22:01 PM	Main Vac valve closed
5/13/2010	1:22:01 PM	Bypass valve closed
5/13/2010	1:22:01 PM	Bubbler valve closed
5/13/2010	1:22:01 PM	Helium valve opened
5/13/2010	1:22:01 PM	Helium MFC set to  500.000000
5/13/2010	1:22:01 PM	H2 MFC set to  0.000000
5/13/2010	1:22:01 PM	BCl3 MFC set to  0.000000
5/13/2010	1:22:01 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:22:01 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:22:01 PM	Tube furnace set to 0
5/13/2010	1:23:23 PM	Helium valve closed
5/13/2010	1:23:23 PM	H2 valve closed
5/13/2010	1:23:23 PM	BCl3 valve closed
5/13/2010	1:23:23 PM	PH3 valve closed
5/13/2010	1:23:23 PM	SiCl4 pre valve closed
5/13/2010	1:23:23 PM	SiCl4 post valve closed
5/13/2010	1:23:23 PM	Main Vac valve closed
5/13/2010	1:23:23 PM	Bypass valve closed
5/13/2010	1:23:23 PM	Bubbler valve closed
5/13/2010	1:23:23 PM	Helium MFC set to  0.000000
5/13/2010	1:23:23 PM	H2 MFC set to  0.000000
5/13/2010	1:23:23 PM	BCl3 MFC set to  0.000000
5/13/2010	1:23:23 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:23:23 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:23:23 PM	Tube furnace set to 0
5/13/2010	1:23:38 PM	Helium valve closed
5/13/2010	1:23:38 PM	H2 valve closed
5/13/2010	1:23:38 PM	BCl3 valve closed
5/13/2010	1:23:38 PM	PH3 valve closed
5/13/2010	1:23:38 PM	SiCl4 pre valve closed
5/13/2010	1:23:38 PM	SiCl4 post valve closed
5/13/2010	1:23:38 PM	Main Vac valve closed
5/13/2010	1:23:38 PM	Bubbler valve closed
5/13/2010	1:23:38 PM	Bypass valve opened
5/13/2010	1:23:38 PM	Helium MFC set to  0.000000
5/13/2010	1:23:38 PM	H2 MFC set to  0.000000
5/13/2010	1:23:38 PM	BCl3 MFC set to  0.000000
5/13/2010	1:23:38 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:23:38 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:23:38 PM	Tube furnace set to 0
5/13/2010	1:24:11 PM	Helium valve closed
5/13/2010	1:24:11 PM	H2 valve closed
5/13/2010	1:24:11 PM	BCl3 valve closed
5/13/2010	1:24:11 PM	PH3 valve closed
5/13/2010	1:24:11 PM	SiCl4 pre valve closed
5/13/2010	1:24:11 PM	SiCl4 post valve closed
5/13/2010	1:24:11 PM	Bubbler valve closed
5/13/2010	1:24:11 PM	Main Vac valve opened
5/13/2010	1:24:11 PM	Bypass valve opened
5/13/2010	1:24:11 PM	Helium MFC set to  0.000000
5/13/2010	1:24:11 PM	H2 MFC set to  0.000000
5/13/2010	1:24:11 PM	BCl3 MFC set to  0.000000
5/13/2010	1:24:11 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:24:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:24:11 PM	Tube furnace set to 0
5/13/2010	1:28:27 PM	Helium valve closed
5/13/2010	1:28:27 PM	H2 valve closed
5/13/2010	1:28:27 PM	BCl3 valve closed
5/13/2010	1:28:27 PM	PH3 valve closed
5/13/2010	1:28:27 PM	SiCl4 pre valve closed
5/13/2010	1:28:27 PM	SiCl4 post valve closed
5/13/2010	1:28:27 PM	Bubbler valve closed
5/13/2010	1:28:27 PM	Main Vac valve opened
5/13/2010	1:28:27 PM	Bypass valve opened
5/13/2010	1:28:27 PM	Helium MFC set to  0.000000
5/13/2010	1:28:27 PM	H2 MFC set to  0.000000
5/13/2010	1:28:27 PM	BCl3 MFC set to  0.000000
5/13/2010	1:28:27 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:28:27 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:28:27 PM	Tube furnace set to 0
5/13/2010	1:28:28 PM	Run finished at 1:28 PM
5/13/2010	1:28:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	1:30:02 PM	Recipe started at 1:30 PM
5/13/2010	1:30:02 PM	Helium valve closed
5/13/2010	1:30:02 PM	BCl3 valve closed
5/13/2010	1:30:02 PM	PH3 valve closed
5/13/2010	1:30:02 PM	SiCl4 pre valve closed
5/13/2010	1:30:02 PM	SiCl4 post valve closed
5/13/2010	1:30:02 PM	Main Vac valve closed
5/13/2010	1:30:02 PM	Bypass valve closed
5/13/2010	1:30:02 PM	Bubbler valve closed
5/13/2010	1:30:02 PM	H2 valve opened
5/13/2010	1:30:02 PM	Helium MFC set to  0.000000
5/13/2010	1:30:02 PM	H2 MFC set to  500.000000
5/13/2010	1:30:02 PM	BCl3 MFC set to  0.000000
5/13/2010	1:30:02 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:30:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:30:02 PM	Tube furnace set to 0
5/13/2010	1:31:24 PM	Helium valve closed
5/13/2010	1:31:24 PM	BCl3 valve closed
5/13/2010	1:31:24 PM	PH3 valve closed
5/13/2010	1:31:24 PM	SiCl4 pre valve closed
5/13/2010	1:31:24 PM	SiCl4 post valve closed
5/13/2010	1:31:24 PM	Main Vac valve closed
5/13/2010	1:31:24 PM	Bypass valve closed
5/13/2010	1:31:24 PM	H2 valve opened
5/13/2010	1:31:24 PM	Bubbler valve opened
5/13/2010	1:31:24 PM	Helium MFC set to  0.000000
5/13/2010	1:31:24 PM	H2 MFC set to  500.000000
5/13/2010	1:31:24 PM	BCl3 MFC set to  0.000000
5/13/2010	1:31:24 PM	SiCl4 MFC set to  0.000000
5/13/2010	1:31:24 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:31:24 PM	Tube furnace set to 1000
5/13/2010	1:51:24 PM	Helium valve closed
5/13/2010	1:51:24 PM	PH3 valve closed
5/13/2010	1:51:24 PM	Main Vac valve closed
5/13/2010	1:51:24 PM	Bypass valve closed
5/13/2010	1:51:24 PM	H2 valve opened
5/13/2010	1:51:24 PM	BCl3 valve opened
5/13/2010	1:51:24 PM	SiCl4 pre valve opened
5/13/2010	1:51:24 PM	SiCl4 post valve opened
5/13/2010	1:51:24 PM	Bubbler valve opened
5/13/2010	1:51:24 PM	Helium MFC set to  0.000000
5/13/2010	1:51:24 PM	H2 MFC set to  500.000000
5/13/2010	1:51:24 PM	BCl3 MFC set to  35.000000
5/13/2010	1:51:24 PM	SiCl4 MFC set to  350.000000
5/13/2010	1:51:24 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	1:51:24 PM	Tube furnace set to 1000
5/13/2010	2:06:24 PM	H2 valve closed
5/13/2010	2:06:24 PM	BCl3 valve closed
5/13/2010	2:06:24 PM	PH3 valve closed
5/13/2010	2:06:24 PM	SiCl4 pre valve closed
5/13/2010	2:06:24 PM	SiCl4 post valve closed
5/13/2010	2:06:24 PM	Main Vac valve closed
5/13/2010	2:06:24 PM	Bypass valve closed
5/13/2010	2:06:24 PM	Helium valve opened
5/13/2010	2:06:24 PM	Bubbler valve opened
5/13/2010	2:06:24 PM	Helium MFC set to  500.000000
5/13/2010	2:06:24 PM	H2 MFC set to  0.000000
5/13/2010	2:06:24 PM	BCl3 MFC set to  0.000000
5/13/2010	2:06:24 PM	SiCl4 MFC set to  0.000000
5/13/2010	2:06:24 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	2:06:25 PM	Tube furnace set to 0
5/13/2010	2:26:25 PM	Helium valve closed
5/13/2010	2:26:25 PM	H2 valve closed
5/13/2010	2:26:25 PM	BCl3 valve closed
5/13/2010	2:26:25 PM	PH3 valve closed
5/13/2010	2:26:25 PM	SiCl4 pre valve closed
5/13/2010	2:26:25 PM	SiCl4 post valve closed
5/13/2010	2:26:25 PM	Main Vac valve closed
5/13/2010	2:26:25 PM	Bypass valve closed
5/13/2010	2:26:25 PM	Bubbler valve closed
5/13/2010	2:26:25 PM	Helium MFC set to  0.000000
5/13/2010	2:26:25 PM	H2 MFC set to  0.000000
5/13/2010	2:26:25 PM	BCl3 MFC set to  0.000000
5/13/2010	2:26:25 PM	SiCl4 MFC set to  0.000000
5/13/2010	2:26:25 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	2:26:25 PM	Tube furnace set to 0
5/13/2010	2:26:25 PM	Run finished at 2:26 PM
5/13/2010	2:52:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	2:52:45 PM	Recipe started at 2:52 PM
5/13/2010	2:52:45 PM	H2 valve closed
5/13/2010	2:52:45 PM	BCl3 valve closed
5/13/2010	2:52:45 PM	PH3 valve closed
5/13/2010	2:52:45 PM	SiCl4 pre valve closed
5/13/2010	2:52:45 PM	SiCl4 post valve closed
5/13/2010	2:52:45 PM	Main Vac valve closed
5/13/2010	2:52:45 PM	Bypass valve closed
5/13/2010	2:52:45 PM	Bubbler valve closed
5/13/2010	2:52:45 PM	Helium valve opened
5/13/2010	2:52:45 PM	Helium MFC set to  500.000000
5/13/2010	2:52:45 PM	H2 MFC set to  0.000000
5/13/2010	2:52:45 PM	BCl3 MFC set to  0.000000
5/13/2010	2:52:45 PM	SiCl4 MFC set to  0.000000
5/13/2010	2:52:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	2:52:45 PM	Tube furnace set to 0
5/13/2010	2:52:53 PM	Helium valve closed
5/13/2010	2:52:53 PM	H2 valve closed
5/13/2010	2:52:53 PM	BCl3 valve closed
5/13/2010	2:52:53 PM	PH3 valve closed
5/13/2010	2:52:53 PM	SiCl4 pre valve closed
5/13/2010	2:52:53 PM	SiCl4 post valve closed
5/13/2010	2:52:53 PM	Main Vac valve closed
5/13/2010	2:52:53 PM	Bypass valve closed
5/13/2010	2:52:53 PM	Bubbler valve closed
5/13/2010	2:52:53 PM	Helium MFC set to  0.000000
5/13/2010	2:52:53 PM	H2 MFC set to  0.000000
5/13/2010	2:52:53 PM	BCl3 MFC set to  0.000000
5/13/2010	2:52:53 PM	SiCl4 MFC set to  0.000000
5/13/2010	2:52:53 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	2:52:53 PM	Tube furnace set to 0
5/13/2010	2:52:54 PM	Run finished at 2:52 PM
5/13/2010	2:52:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	3:14:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	3:15:01 PM	Recipe started at 3:14 PM
5/13/2010	3:15:01 PM	H2 valve closed
5/13/2010	3:15:01 PM	BCl3 valve closed
5/13/2010	3:15:01 PM	PH3 valve closed
5/13/2010	3:15:01 PM	SiCl4 pre valve closed
5/13/2010	3:15:01 PM	SiCl4 post valve closed
5/13/2010	3:15:01 PM	Main Vac valve closed
5/13/2010	3:15:01 PM	Bypass valve closed
5/13/2010	3:15:01 PM	Bubbler valve closed
5/13/2010	3:15:01 PM	Helium valve opened
5/13/2010	3:15:01 PM	Helium MFC set to  500.000000
5/13/2010	3:15:01 PM	H2 MFC set to  0.000000
5/13/2010	3:15:01 PM	BCl3 MFC set to  0.000000
5/13/2010	3:15:01 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:15:01 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:15:02 PM	Tube furnace set to 0
5/13/2010	3:15:04 PM	Helium valve closed
5/13/2010	3:15:04 PM	H2 valve closed
5/13/2010	3:15:04 PM	BCl3 valve closed
5/13/2010	3:15:04 PM	PH3 valve closed
5/13/2010	3:15:04 PM	SiCl4 pre valve closed
5/13/2010	3:15:04 PM	SiCl4 post valve closed
5/13/2010	3:15:04 PM	Main Vac valve closed
5/13/2010	3:15:04 PM	Bypass valve closed
5/13/2010	3:15:04 PM	Bubbler valve closed
5/13/2010	3:15:04 PM	Helium MFC set to  0.000000
5/13/2010	3:15:04 PM	H2 MFC set to  0.000000
5/13/2010	3:15:04 PM	BCl3 MFC set to  0.000000
5/13/2010	3:15:04 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:15:04 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:15:04 PM	Tube furnace set to 0
5/13/2010	3:15:19 PM	Helium valve closed
5/13/2010	3:15:19 PM	H2 valve closed
5/13/2010	3:15:19 PM	BCl3 valve closed
5/13/2010	3:15:19 PM	PH3 valve closed
5/13/2010	3:15:19 PM	SiCl4 pre valve closed
5/13/2010	3:15:19 PM	SiCl4 post valve closed
5/13/2010	3:15:19 PM	Main Vac valve closed
5/13/2010	3:15:19 PM	Bubbler valve closed
5/13/2010	3:15:19 PM	Bypass valve opened
5/13/2010	3:15:19 PM	Helium MFC set to  0.000000
5/13/2010	3:15:19 PM	H2 MFC set to  0.000000
5/13/2010	3:15:19 PM	BCl3 MFC set to  0.000000
5/13/2010	3:15:19 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:15:19 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:15:19 PM	Tube furnace set to 0
5/13/2010	3:16:06 PM	Helium valve closed
5/13/2010	3:16:06 PM	H2 valve closed
5/13/2010	3:16:06 PM	BCl3 valve closed
5/13/2010	3:16:06 PM	PH3 valve closed
5/13/2010	3:16:06 PM	SiCl4 pre valve closed
5/13/2010	3:16:06 PM	SiCl4 post valve closed
5/13/2010	3:16:06 PM	Bubbler valve closed
5/13/2010	3:16:06 PM	Main Vac valve opened
5/13/2010	3:16:06 PM	Bypass valve opened
5/13/2010	3:16:06 PM	Helium MFC set to  0.000000
5/13/2010	3:16:06 PM	H2 MFC set to  0.000000
5/13/2010	3:16:06 PM	BCl3 MFC set to  0.000000
5/13/2010	3:16:06 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:16:06 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:16:06 PM	Tube furnace set to 0
5/13/2010	3:21:06 PM	H2 valve closed
5/13/2010	3:21:06 PM	BCl3 valve closed
5/13/2010	3:21:06 PM	PH3 valve closed
5/13/2010	3:21:06 PM	SiCl4 pre valve closed
5/13/2010	3:21:06 PM	SiCl4 post valve closed
5/13/2010	3:21:06 PM	Main Vac valve closed
5/13/2010	3:21:06 PM	Bypass valve closed
5/13/2010	3:21:06 PM	Bubbler valve closed
5/13/2010	3:21:06 PM	Helium valve opened
5/13/2010	3:21:06 PM	Helium MFC set to  500.000000
5/13/2010	3:21:06 PM	H2 MFC set to  0.000000
5/13/2010	3:21:06 PM	BCl3 MFC set to  0.000000
5/13/2010	3:21:06 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:21:06 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:21:06 PM	Tube furnace set to 0
5/13/2010	3:22:27 PM	Helium valve closed
5/13/2010	3:22:27 PM	H2 valve closed
5/13/2010	3:22:27 PM	BCl3 valve closed
5/13/2010	3:22:27 PM	PH3 valve closed
5/13/2010	3:22:27 PM	SiCl4 pre valve closed
5/13/2010	3:22:27 PM	SiCl4 post valve closed
5/13/2010	3:22:27 PM	Main Vac valve closed
5/13/2010	3:22:27 PM	Bypass valve closed
5/13/2010	3:22:27 PM	Bubbler valve closed
5/13/2010	3:22:27 PM	Helium MFC set to  0.000000
5/13/2010	3:22:27 PM	H2 MFC set to  0.000000
5/13/2010	3:22:27 PM	BCl3 MFC set to  0.000000
5/13/2010	3:22:27 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:22:27 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:22:28 PM	Tube furnace set to 0
5/13/2010	3:22:43 PM	Helium valve closed
5/13/2010	3:22:43 PM	H2 valve closed
5/13/2010	3:22:43 PM	BCl3 valve closed
5/13/2010	3:22:43 PM	PH3 valve closed
5/13/2010	3:22:43 PM	SiCl4 pre valve closed
5/13/2010	3:22:43 PM	SiCl4 post valve closed
5/13/2010	3:22:43 PM	Main Vac valve closed
5/13/2010	3:22:43 PM	Bubbler valve closed
5/13/2010	3:22:43 PM	Bypass valve opened
5/13/2010	3:22:43 PM	Helium MFC set to  0.000000
5/13/2010	3:22:43 PM	H2 MFC set to  0.000000
5/13/2010	3:22:43 PM	BCl3 MFC set to  0.000000
5/13/2010	3:22:43 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:22:43 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:22:43 PM	Tube furnace set to 0
5/13/2010	3:23:15 PM	Helium valve closed
5/13/2010	3:23:15 PM	H2 valve closed
5/13/2010	3:23:15 PM	BCl3 valve closed
5/13/2010	3:23:15 PM	PH3 valve closed
5/13/2010	3:23:15 PM	SiCl4 pre valve closed
5/13/2010	3:23:15 PM	SiCl4 post valve closed
5/13/2010	3:23:15 PM	Bubbler valve closed
5/13/2010	3:23:15 PM	Main Vac valve opened
5/13/2010	3:23:15 PM	Bypass valve opened
5/13/2010	3:23:15 PM	Helium MFC set to  0.000000
5/13/2010	3:23:15 PM	H2 MFC set to  0.000000
5/13/2010	3:23:15 PM	BCl3 MFC set to  0.000000
5/13/2010	3:23:15 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:23:15 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:23:15 PM	Tube furnace set to 0
5/13/2010	3:28:15 PM	H2 valve closed
5/13/2010	3:28:15 PM	BCl3 valve closed
5/13/2010	3:28:15 PM	PH3 valve closed
5/13/2010	3:28:15 PM	SiCl4 pre valve closed
5/13/2010	3:28:15 PM	SiCl4 post valve closed
5/13/2010	3:28:15 PM	Main Vac valve closed
5/13/2010	3:28:15 PM	Bypass valve closed
5/13/2010	3:28:15 PM	Bubbler valve closed
5/13/2010	3:28:15 PM	Helium valve opened
5/13/2010	3:28:15 PM	Helium MFC set to  500.000000
5/13/2010	3:28:15 PM	H2 MFC set to  0.000000
5/13/2010	3:28:15 PM	BCl3 MFC set to  0.000000
5/13/2010	3:28:15 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:28:15 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:28:15 PM	Tube furnace set to 0
5/13/2010	3:29:36 PM	Helium valve closed
5/13/2010	3:29:36 PM	H2 valve closed
5/13/2010	3:29:36 PM	BCl3 valve closed
5/13/2010	3:29:36 PM	PH3 valve closed
5/13/2010	3:29:36 PM	SiCl4 pre valve closed
5/13/2010	3:29:36 PM	SiCl4 post valve closed
5/13/2010	3:29:36 PM	Main Vac valve closed
5/13/2010	3:29:36 PM	Bypass valve closed
5/13/2010	3:29:36 PM	Bubbler valve closed
5/13/2010	3:29:36 PM	Helium MFC set to  0.000000
5/13/2010	3:29:36 PM	H2 MFC set to  0.000000
5/13/2010	3:29:36 PM	BCl3 MFC set to  0.000000
5/13/2010	3:29:36 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:29:36 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:29:36 PM	Tube furnace set to 0
5/13/2010	3:29:51 PM	Helium valve closed
5/13/2010	3:29:51 PM	H2 valve closed
5/13/2010	3:29:51 PM	BCl3 valve closed
5/13/2010	3:29:51 PM	PH3 valve closed
5/13/2010	3:29:51 PM	SiCl4 pre valve closed
5/13/2010	3:29:51 PM	SiCl4 post valve closed
5/13/2010	3:29:51 PM	Main Vac valve closed
5/13/2010	3:29:51 PM	Bubbler valve closed
5/13/2010	3:29:51 PM	Bypass valve opened
5/13/2010	3:29:51 PM	Helium MFC set to  0.000000
5/13/2010	3:29:51 PM	H2 MFC set to  0.000000
5/13/2010	3:29:51 PM	BCl3 MFC set to  0.000000
5/13/2010	3:29:51 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:29:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:29:51 PM	Tube furnace set to 0
5/13/2010	3:30:23 PM	Helium valve closed
5/13/2010	3:30:23 PM	H2 valve closed
5/13/2010	3:30:23 PM	BCl3 valve closed
5/13/2010	3:30:23 PM	PH3 valve closed
5/13/2010	3:30:23 PM	SiCl4 pre valve closed
5/13/2010	3:30:23 PM	SiCl4 post valve closed
5/13/2010	3:30:23 PM	Bubbler valve closed
5/13/2010	3:30:23 PM	Main Vac valve opened
5/13/2010	3:30:23 PM	Bypass valve opened
5/13/2010	3:30:23 PM	Helium MFC set to  0.000000
5/13/2010	3:30:23 PM	H2 MFC set to  0.000000
5/13/2010	3:30:23 PM	BCl3 MFC set to  0.000000
5/13/2010	3:30:23 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:30:23 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:30:24 PM	Tube furnace set to 0
5/13/2010	3:32:42 PM	Helium valve closed
5/13/2010	3:32:42 PM	H2 valve closed
5/13/2010	3:32:42 PM	BCl3 valve closed
5/13/2010	3:32:42 PM	PH3 valve closed
5/13/2010	3:32:42 PM	SiCl4 pre valve closed
5/13/2010	3:32:42 PM	SiCl4 post valve closed
5/13/2010	3:32:42 PM	Bubbler valve closed
5/13/2010	3:32:42 PM	Main Vac valve opened
5/13/2010	3:32:42 PM	Bypass valve opened
5/13/2010	3:32:42 PM	Helium MFC set to  0.000000
5/13/2010	3:32:42 PM	H2 MFC set to  0.000000
5/13/2010	3:32:42 PM	BCl3 MFC set to  0.000000
5/13/2010	3:32:42 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:32:42 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:32:42 PM	Tube furnace set to 0
5/13/2010	3:32:43 PM	Run finished at 3:32 PM
5/13/2010	3:32:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/13/2010	3:33:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	3:33:11 PM	Recipe started at 3:33 PM
5/13/2010	3:33:11 PM	H2 valve closed
5/13/2010	3:33:11 PM	BCl3 valve closed
5/13/2010	3:33:11 PM	PH3 valve closed
5/13/2010	3:33:11 PM	SiCl4 pre valve closed
5/13/2010	3:33:11 PM	SiCl4 post valve closed
5/13/2010	3:33:11 PM	Main Vac valve closed
5/13/2010	3:33:11 PM	Bypass valve closed
5/13/2010	3:33:11 PM	Bubbler valve closed
5/13/2010	3:33:11 PM	Helium valve opened
5/13/2010	3:33:11 PM	Helium MFC set to  500.000000
5/13/2010	3:33:11 PM	H2 MFC set to  0.000000
5/13/2010	3:33:11 PM	BCl3 MFC set to  0.000000
5/13/2010	3:33:11 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:33:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:33:11 PM	Tube furnace set to 0
5/13/2010	3:34:10 PM	Helium valve closed
5/13/2010	3:34:10 PM	H2 valve closed
5/13/2010	3:34:10 PM	BCl3 valve closed
5/13/2010	3:34:10 PM	PH3 valve closed
5/13/2010	3:34:10 PM	SiCl4 pre valve closed
5/13/2010	3:34:10 PM	SiCl4 post valve closed
5/13/2010	3:34:10 PM	Main Vac valve closed
5/13/2010	3:34:10 PM	Bypass valve closed
5/13/2010	3:34:10 PM	Bubbler valve closed
5/13/2010	3:34:10 PM	Helium MFC set to  0.000000
5/13/2010	3:34:10 PM	H2 MFC set to  0.000000
5/13/2010	3:34:10 PM	BCl3 MFC set to  0.000000
5/13/2010	3:34:10 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:34:10 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:34:10 PM	Tube furnace set to 0
5/13/2010	3:34:10 PM	Run finished at 3:34 PM
5/13/2010	3:34:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	3:34:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	3:34:14 PM	Recipe started at 3:34 PM
5/13/2010	3:34:14 PM	Helium valve closed
5/13/2010	3:34:14 PM	H2 valve closed
5/13/2010	3:34:14 PM	BCl3 valve closed
5/13/2010	3:34:14 PM	PH3 valve closed
5/13/2010	3:34:14 PM	SiCl4 pre valve closed
5/13/2010	3:34:14 PM	SiCl4 post valve closed
5/13/2010	3:34:14 PM	Main Vac valve closed
5/13/2010	3:34:14 PM	Bubbler valve closed
5/13/2010	3:34:14 PM	Bypass valve opened
5/13/2010	3:34:14 PM	Helium MFC set to  0.000000
5/13/2010	3:34:14 PM	H2 MFC set to  0.000000
5/13/2010	3:34:14 PM	BCl3 MFC set to  0.000000
5/13/2010	3:34:14 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:34:14 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:34:14 PM	Tube furnace set to 0
5/13/2010	3:34:44 PM	Helium valve closed
5/13/2010	3:34:44 PM	H2 valve closed
5/13/2010	3:34:44 PM	BCl3 valve closed
5/13/2010	3:34:44 PM	PH3 valve closed
5/13/2010	3:34:44 PM	SiCl4 pre valve closed
5/13/2010	3:34:44 PM	SiCl4 post valve closed
5/13/2010	3:34:44 PM	Bubbler valve closed
5/13/2010	3:34:44 PM	Main Vac valve opened
5/13/2010	3:34:44 PM	Bypass valve opened
5/13/2010	3:34:44 PM	Helium MFC set to  0.000000
5/13/2010	3:34:44 PM	H2 MFC set to  0.000000
5/13/2010	3:34:44 PM	BCl3 MFC set to  0.000000
5/13/2010	3:34:44 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:34:44 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:34:44 PM	Tube furnace set to 0
5/13/2010	3:34:44 PM	Run finished at 3:34 PM
5/13/2010	3:34:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	3:56:41 PM	Recipe started at 3:56 PM
5/13/2010	3:56:41 PM	Helium valve closed
5/13/2010	3:56:41 PM	BCl3 valve closed
5/13/2010	3:56:41 PM	PH3 valve closed
5/13/2010	3:56:41 PM	SiCl4 pre valve closed
5/13/2010	3:56:41 PM	SiCl4 post valve closed
5/13/2010	3:56:41 PM	Main Vac valve closed
5/13/2010	3:56:41 PM	Bypass valve closed
5/13/2010	3:56:41 PM	Bubbler valve closed
5/13/2010	3:56:41 PM	H2 valve opened
5/13/2010	3:56:41 PM	Helium MFC set to  0.000000
5/13/2010	3:56:41 PM	H2 MFC set to  500.000000
5/13/2010	3:56:41 PM	BCl3 MFC set to  0.000000
5/13/2010	3:56:41 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:56:41 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:56:41 PM	Tube furnace set to 0
5/13/2010	3:58:02 PM	Helium valve closed
5/13/2010	3:58:02 PM	BCl3 valve closed
5/13/2010	3:58:02 PM	PH3 valve closed
5/13/2010	3:58:02 PM	SiCl4 pre valve closed
5/13/2010	3:58:02 PM	SiCl4 post valve closed
5/13/2010	3:58:02 PM	Main Vac valve closed
5/13/2010	3:58:02 PM	Bypass valve closed
5/13/2010	3:58:02 PM	H2 valve opened
5/13/2010	3:58:02 PM	Bubbler valve opened
5/13/2010	3:58:02 PM	Helium MFC set to  0.000000
5/13/2010	3:58:02 PM	H2 MFC set to  500.000000
5/13/2010	3:58:02 PM	BCl3 MFC set to  0.000000
5/13/2010	3:58:02 PM	SiCl4 MFC set to  0.000000
5/13/2010	3:58:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	3:58:02 PM	Tube furnace set to 1000
5/13/2010	4:18:02 PM	Helium valve closed
5/13/2010	4:18:02 PM	PH3 valve closed
5/13/2010	4:18:02 PM	Main Vac valve closed
5/13/2010	4:18:02 PM	Bypass valve closed
5/13/2010	4:18:02 PM	H2 valve opened
5/13/2010	4:18:02 PM	BCl3 valve opened
5/13/2010	4:18:02 PM	SiCl4 pre valve opened
5/13/2010	4:18:02 PM	SiCl4 post valve opened
5/13/2010	4:18:02 PM	Bubbler valve opened
5/13/2010	4:18:02 PM	Helium MFC set to  0.000000
5/13/2010	4:18:02 PM	H2 MFC set to  500.000000
5/13/2010	4:18:02 PM	BCl3 MFC set to  35.000000
5/13/2010	4:18:02 PM	SiCl4 MFC set to  350.000000
5/13/2010	4:18:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	4:18:02 PM	Tube furnace set to 1000
5/13/2010	4:33:02 PM	H2 valve closed
5/13/2010	4:33:02 PM	BCl3 valve closed
5/13/2010	4:33:02 PM	PH3 valve closed
5/13/2010	4:33:02 PM	SiCl4 pre valve closed
5/13/2010	4:33:02 PM	SiCl4 post valve closed
5/13/2010	4:33:02 PM	Main Vac valve closed
5/13/2010	4:33:02 PM	Bypass valve closed
5/13/2010	4:33:02 PM	Helium valve opened
5/13/2010	4:33:02 PM	Bubbler valve opened
5/13/2010	4:33:02 PM	Helium MFC set to  500.000000
5/13/2010	4:33:02 PM	H2 MFC set to  0.000000
5/13/2010	4:33:02 PM	BCl3 MFC set to  0.000000
5/13/2010	4:33:02 PM	SiCl4 MFC set to  0.000000
5/13/2010	4:33:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	4:33:02 PM	Tube furnace set to 0
5/13/2010	4:53:02 PM	Helium valve closed
5/13/2010	4:53:02 PM	H2 valve closed
5/13/2010	4:53:02 PM	BCl3 valve closed
5/13/2010	4:53:02 PM	PH3 valve closed
5/13/2010	4:53:02 PM	SiCl4 pre valve closed
5/13/2010	4:53:02 PM	SiCl4 post valve closed
5/13/2010	4:53:02 PM	Main Vac valve closed
5/13/2010	4:53:02 PM	Bypass valve closed
5/13/2010	4:53:02 PM	Bubbler valve closed
5/13/2010	4:53:02 PM	Helium MFC set to  0.000000
5/13/2010	4:53:02 PM	H2 MFC set to  0.000000
5/13/2010	4:53:02 PM	BCl3 MFC set to  0.000000
5/13/2010	4:53:02 PM	SiCl4 MFC set to  0.000000
5/13/2010	4:53:02 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	4:53:02 PM	Tube furnace set to 0
5/13/2010	4:53:03 PM	Run finished at 4:53 PM
5/13/2010	5:18:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	5:18:19 PM	Recipe started at 5:18 PM
5/13/2010	5:18:19 PM	H2 valve closed
5/13/2010	5:18:19 PM	BCl3 valve closed
5/13/2010	5:18:19 PM	PH3 valve closed
5/13/2010	5:18:19 PM	SiCl4 pre valve closed
5/13/2010	5:18:19 PM	SiCl4 post valve closed
5/13/2010	5:18:19 PM	Main Vac valve closed
5/13/2010	5:18:19 PM	Bypass valve closed
5/13/2010	5:18:19 PM	Bubbler valve closed
5/13/2010	5:18:19 PM	Helium valve opened
5/13/2010	5:18:19 PM	Helium MFC set to  500.000000
5/13/2010	5:18:19 PM	H2 MFC set to  0.000000
5/13/2010	5:18:19 PM	BCl3 MFC set to  0.000000
5/13/2010	5:18:19 PM	SiCl4 MFC set to  0.000000
5/13/2010	5:18:19 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	5:18:19 PM	Tube furnace set to 0
5/13/2010	5:18:25 PM	Helium valve closed
5/13/2010	5:18:25 PM	H2 valve closed
5/13/2010	5:18:25 PM	BCl3 valve closed
5/13/2010	5:18:25 PM	PH3 valve closed
5/13/2010	5:18:25 PM	SiCl4 pre valve closed
5/13/2010	5:18:25 PM	SiCl4 post valve closed
5/13/2010	5:18:25 PM	Main Vac valve closed
5/13/2010	5:18:25 PM	Bypass valve closed
5/13/2010	5:18:25 PM	Bubbler valve closed
5/13/2010	5:18:25 PM	Helium MFC set to  0.000000
5/13/2010	5:18:25 PM	H2 MFC set to  0.000000
5/13/2010	5:18:25 PM	BCl3 MFC set to  0.000000
5/13/2010	5:18:25 PM	SiCl4 MFC set to  0.000000
5/13/2010	5:18:25 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	5:18:25 PM	Tube furnace set to 0
5/13/2010	5:18:25 PM	Run finished at 5:18 PM
5/13/2010	5:18:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2010	5:20:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2010	5:20:16 PM	Recipe started at 5:20 PM
5/13/2010	5:20:16 PM	Helium valve closed
5/13/2010	5:20:16 PM	H2 valve closed
5/13/2010	5:20:16 PM	BCl3 valve closed
5/13/2010	5:20:16 PM	PH3 valve closed
5/13/2010	5:20:16 PM	SiCl4 pre valve closed
5/13/2010	5:20:16 PM	SiCl4 post valve closed
5/13/2010	5:20:16 PM	Main Vac valve closed
5/13/2010	5:20:16 PM	Bubbler valve closed
5/13/2010	5:20:16 PM	Bypass valve opened
5/13/2010	5:20:16 PM	Helium MFC set to  0.000000
5/13/2010	5:20:16 PM	H2 MFC set to  0.000000
5/13/2010	5:20:16 PM	BCl3 MFC set to  0.000000
5/13/2010	5:20:16 PM	SiCl4 MFC set to  0.000000
5/13/2010	5:20:16 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	5:20:16 PM	Tube furnace set to 0
5/13/2010	5:21:00 PM	Helium valve closed
5/13/2010	5:21:00 PM	H2 valve closed
5/13/2010	5:21:00 PM	BCl3 valve closed
5/13/2010	5:21:00 PM	PH3 valve closed
5/13/2010	5:21:00 PM	SiCl4 pre valve closed
5/13/2010	5:21:00 PM	SiCl4 post valve closed
5/13/2010	5:21:00 PM	Bubbler valve closed
5/13/2010	5:21:00 PM	Main Vac valve opened
5/13/2010	5:21:00 PM	Bypass valve opened
5/13/2010	5:21:00 PM	Helium MFC set to  0.000000
5/13/2010	5:21:00 PM	H2 MFC set to  0.000000
5/13/2010	5:21:00 PM	BCl3 MFC set to  0.000000
5/13/2010	5:21:00 PM	SiCl4 MFC set to  0.000000
5/13/2010	5:21:00 PM	Bypass solenoid MFC set to  0.000000
5/13/2010	5:21:00 PM	Tube furnace set to 0
5/13/2010	5:21:00 PM	Run finished at 5:21 PM
5/13/2010	5:21:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
